Combination of nitrogen mediated crystallisation with post-deposition annealing—Towards ultra-thin ZnO:Al contacts

Author:

Muydinov R.,Ruske F.,Neubert S.,Steigert A.,Klaus M.,Selve S.,Köppel G.,Szyszka B.

Funder

BMWi

Federal Ministry of Education and Research

Federal Ministry of Environment

State Government of Berlin

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference23 articles.

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2. Effect of film thickness on the properties of indium tin oxide thin films;Kim;J. Appl. Phys.,2000

3. ZnO:Al with tuned properties for photovoltaic applications: thin layers and high mobility material Proc;Ruske;SPIE,2013

4. Transparent conducting oxide semiconductors for transparent electrodes;Minami;Semicond. Sci. Technol.,2005

5. Model for thickness dependence of mobility and concentration in highly conductive zinc oxide;Look;Opt. Eng.,2013

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