Structural, optical, and electrical properties of AZO films by tilted angle sputtering method
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference18 articles.
1. Comparative material study on RF and DC magnetron sputtered ZnO:Al films
2. Effect of high substrate temperature on Al-doped ZnO thin films grown by pulsed laser deposition
3. Hetero-epitaxial growth of ZnO thin films by atmospheric pressure CVD method
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3. Origin of enhanced carrier mobility and electrical conductivity in seed-layer assisted sputtered grown Al doped ZnO thin films;Thin Solid Films;2020-04
4. Effect of substrates and post-deposition annealing on rf-sputtered Al-doped ZnO (AZO) thin films;Journal of Materials Science: Materials in Electronics;2019-07-11
5. Glancing Angle Deposition of Zn-Doped Calcium Phosphate Coatings by RF Magnetron Sputtering;Coatings;2019-03-28
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