Optical characterization of sputtered aluminum nitride thin films – correlating refractive index with degree of c-axis orientation
Author:
Funder
German Research Council
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference38 articles.
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3. Combined assessment of piezoelectric AlN films using X-ray diffraction, infrared absorption and atomic force microscopy;Olivares;Diam. Relat. Mater.,2007
4. Zero-temperature-coefficient SAW devices on AlN epitaxial films;Tsubouchi;IEEE Transact. Sonics Ultrason. SU,1985
5. Property characterization of AlN thin films in composite resonator structure;Chen;J. Appl. Phys.,2007
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