Effect of the varied nitrogen vacancy concentration on mechanical and electrical properties of ZrNx thin films
Author:
Funder
NSFC
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference41 articles.
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3. Improved radiation damage tolerance of titanium nitride ceramics by introduction of vacancy defects;Xue;J. Eur. Ceram. Soc.,2015
4. Optical properties and plasmonic performance of titanium nitride;Patsalas;Materials,2015
5. Negative effect of vacancies on cubic symmetry, hardness and conductivity in hafnium nitride films;Hu;Scr. Mater.,2015
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1. Effect of Nitrogen Partial Pressure on Structure, Mechanical Property, and Corrosion Behavior of ZrNx Films Prepared by Reactive DC Magnetron Sputtering;Scanning;2023-04-10
2. Effects of N2/Ar flow ratio on the structures and mechanical behavior of ZrOxNy/V2O3 nano-multilayered films;Materials Science and Engineering: A;2022-08
3. Structural engineering of transition-metal nitrides for surface-enhanced Raman scattering chips;Nano Research;2021-11-09
4. The influence of nitrogen on the morphology of ZrN coatings deposited by magnetron sputtering;Applied Surface Science;2020-08
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