Calibrating the Z-magnification of atomic force microscope below 10 nm by single-atom steps-Reference-Cited by-同舟云学术

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Calibrating the Z-magnification of atomic force microscope below 10 nm by single-atom steps

Published:2015-06 Issue: Volume:584 Page:372-377
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

He Bo-Ching,Fu Wei-En,Wu Chung-Lin,Chien Yun-San,Liou Huay-Chung

Funder

Bureau of Standards, Metrology and Inspection Nanometer-Scale Metrology

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference22 articles.

1. Controlled scalable synthesis of uniform, high-quality monolayer and few-layer MoS2 films;Yu;Sci. Rep.,2013

2. Layer-dependent electrocatalysis of MoS2 for hydrogen evolution;Yu;Nano Lett.,2014

3. Scanning Probe Microscopy for Industrial Applications: Nanomechanical Characterization;Yablon,2013

4. Progress on accurate metrology of pitch, height, roughness, and width artifacts using an atomic force microscope;Schneir;Proc. SPIE,1995

5. Reliability of parameters of associated base straight line in step height samples: uncertainty evaluation in step height measurements using nanometrological AFM;Misumia;Precis. Eng.,2006

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