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Structural and optical properties of Gd implanted GaN with various crystallographic orientations

  • Published:2017-09 Issue: Volume:638 Page:63-72
  • ISSN:0040-6090
  • Container-title:Thin Solid Films
  • language:en
  • Short-container-title:Thin Solid Films

Author:

Macková A.,Malinský P.,Jagerová A.,Sofer Z.,Klímová K.,Sedmidubský D.,Pristovsek M.,Mikulics M.,Lorinčík J.,Böttger R.,Akhmadaliev S.

Funder

SUSEN

Czech Science Foundation

University of J. E. Purkinje

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference40 articles.

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3. Phosphorus implantation of Mg-doped (Al)GaN heterostructures: structural examination and depth profiling;Journal of Materials Science: Materials in Electronics;2020-09-17

4. Structural and optical characteristics investigations in oxygen ion implanted GaN epitaxial layers;Materials Science in Semiconductor Processing;2020-03

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