Author:
Limmanee Amornrat,Otsubo Michio,Sugiura Tsutomu,Sato Takehiko,Miyajima Shinsuke,Yamada Akira,Konagai Makoto
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
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5. Characterization of Si wafers by μ-PCD with surface electric field
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