Influence of Ne sputtering gas on structure and properties of diamond-like carbon films deposited by pulsed-magnetron sputtering-Reference-Cited by-同舟云学术

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Influence of Ne sputtering gas on structure and properties of diamond-like carbon films deposited by pulsed-magnetron sputtering

Published:2017-03 Issue: Volume:625 Page:163-167
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Dai Wei,Gao Xiang,Wang Qimin,Xu Aijiao

Funder

National Natural Science Foundation of China

Natural Science Foundation of Guangdong province

Zhejiang Provincial Key Laboratory for Cutting Tools

Zhujiang New Star of Science and Technology of Guangzhou City

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Diamond-like amorphous carbon;Robertson;Mater. Sci. Eng. R,2002

2. History of diamond-like carbon films-from fist experiments to worldwide applications;Bewilogua;Surf. Coat. Technol.,2014

3. 60years of DLC coatings: historical highlights and technical review of cathodic arc processes to synthesize various DLC types, and their evolution for industrial applications;Vetter;Surf. Coat. Technol.,2014

4. Friction properties of amorphous carbon ultrathin films deposited by filtered cathodic vacuum arc and radio-frequency sputtering;Matlak;Thin Solid Films,2015

5. Development and application of cathodic vacuum arc plasma for nanostructured and nanocomposite film deposition;Medhisuwakul;Surf. Coat. Technol.,2013

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1. Microstructure, mechanical and tribological properties of Ti doped ta-C films deposited by a hybrid coating system;Diamond and Related Materials;2023-01

2. Diamond-like/graphite-like carbon composite films deposited by high-power impulse magnetron sputtering;Diamond and Related Materials;2020-06

3. Structure and cutting performance of Ti-DLC films prepared by reactive magnetron sputtering;Diamond and Related Materials;2020-04

4. Effect of sputtering pressure on the surface topography, structure, wettability and tribological performance of DLC films coated on rubber by magnetron sputtering;Surface and Coatings Technology;2019-05

5. Microstructure, adhesion and tribological behaviors of Si interlayer/Si doping diamond-like carbon film developed on nitrile butadiene rubber;Diamond and Related Materials;2019-02

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