Wafer bowing control of free-standing heteroepitaxial diamond (100) films grown on Ir(100) substrates via patterned nucleation growth
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference25 articles.
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3. Physical bending of heteroepitaxial diamond grown on an Ir/MgO substrate;Diamond and Related Materials;2023-08
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5. Heteroepitaxy of diamond semiconductor on iridium: a review;Functional Diamond;2022-12-31
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