Characterization of SiNx:H thin film as a hydrogen passivation layer for silicon solar cells with passivated contacts-Reference-Cited by-同舟云学术

Characterization of SiNx:H thin film as a hydrogen passivation layer for silicon solar cells with passivated contacts

Published:2019-04 Issue: Volume:675 Page:109-114
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Kim Jae Eun,Park Se Jin,Hyun Ji Yeon,Park Hyomin,Bae Soohyun,Ji Kwang-sun,Kim Hyunho,Lee Kyung Dong,Kang Yoonmook^ORCID,Lee Hae-Seok,Kim Donghwan^ORCID

Funder

Korea Institute of Energy Technology Evaluation and PlanningKorea Institute of Energy Technology Evaluation and Planning (KETEP)

Ministry of Trade, Industy & Energy

"Human Resources Program in Energy Technology"

Ministy of Trade, Industry and Energy

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. Hydrogen desorption and diffusion in PECVD silicon nitride. Application to passivation of CMOS active pixel sensors;Benoit;Microelectron. Eng.,2007

2. A comprehensive model of hydrogen transport into a solar cell during silicon nitride processing for fire-through metallization;Sopori,2005

3. Defects and hydrogen in amorphous silicon nitride;Robertson;Philos. Mag. B,1994

4. H loss mechanism during anneal of silicon nitride: chemical dissociation;Boehme;J. Appl. Phys.,2000

5. Determination of silicon nitride film chemical composition to study hydrogen desorption mechanisms;Benoit;Thin Solid Films,2011

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