Effect of argon ion energy on the performance of silicon nitride multilayer permeation barriers grown by hot-wire CVD on polymers-Reference-Cited by-同舟云学术

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Effect of argon ion energy on the performance of silicon nitride multilayer permeation barriers grown by hot-wire CVD on polymers

Published:2015-11 Issue: Volume:595 Page:258-265
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Alpuim P.,Majee S.,Cerqueira M.F.,Tondelier D.,Geffroy B.,Bonnassieux Y.,Bourée J.E.

Funder

PICS

Direction des Relations Extérieures of Ecole Polytechnique

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference71 articles.

1. Silicon for thin-film transistors;Wagner;Thin Solid Films,2003

2. Thin-film permeation-barrier technology for flexible organic light-emitting devices;Lewis;IEEE J. Sel. Top. Quantum Electron.,2004

3. Investigation of the sites of dark spots in organic light-emitting devices;Liew;Appl. Phys. Lett.,2000

4. Organic light-emitting devices with extended operating lifetimes on plastic substrates;Weaver;Appl. Phys. Lett.,2002

5. Gas permeation and lifetime tests on polymer-based barrier coatings;Burrows;Proc. SPIE,2001

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3. Improvement in the moisture barrier properties and flexibility by reducing hydrogen dangling bonds in SiNx thin films with plasma surface treatment;Surface and Coatings Technology;2020-02

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