Nanometer-Thick SiN Films as Gas Barrier Coatings Densified by Vacuum UV Irradiation
Author:
Affiliation:
1. Department of Organic Materials Science, Yamagata University, Jonan 4-3-16, Yonezawa, Yamagata 992-8510, Japan
2. Innovation Center for Organic Electronics (INOEL), Yamagata University, Arcadia 1-808-48, Yonezawa, Yamagata 992-0119, Japan
Funder
Japan Society for the Promotion of Science
Japan Science and Technology Agency
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsanm.1c01862
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