Author:
Cook Candi S.,Daly Terry,Liu Ran,Canonico Michael,Xie Q.,Gregory R.B.,Zollner Stefan
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. Handbook of Silicon Semiconductor Metrology;Diebold,2001
2. Spectroscopic Ellipsometry and Reflectometry;Tompkins,1999
3. Characterization and Metrology for ULSI Technology 2000;Zollner,2001
4. S. Zollner, D. Zarr, In: 2000 IEEE International Symposium on Compound Semiconductors, IEEE, 2000, p. 13
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