Advanced measurement and diagnosis of the effect on the underlayer roughness for industrial standard metrology-Reference-Cited by-同舟云学术

Advanced measurement and diagnosis of the effect on the underlayer roughness for industrial standard metrology

Published:2019-01-31 Issue:1 Volume:9 Page:
ISSN:2045-2322
Container-title:Scientific Reports
language:en
Short-container-title:Sci Rep

Author:

Kim Jung-Hwan,Moon Seunghyun,Kim Ji-Woong,Lee Donggun,Park Byong Chon,Kim Dal-Hyun,Jeong Yoojin,Hand Sean,Osborne Jason,De Wolf Peter,Kim Youn Sang^ORCID,Shin ChaeHo

Funder

Korea Basic Science Institute

the R & D Convergence Program of National Research Council of Science and Technology (NST) of the Republic of Korea

Korea Research Institute of Standards and Science

Publisher

Springer Science and Business Media LLC

Subject

Multidisciplinary

Link

http://www.nature.com/articles/s41598-018-36991-z.pdf

Reference44 articles.

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3. Baram, M. & Kaplan, W. D. Quantitative HRTEM analysis of FIB prepared specimens. J. Microsc. 232, 395–405 (2008).

4. Wang, W. et al. Digital Etch Technique for Forming Ultra-Scaled Germanium-Tin (Ge 1−x Sn x) FinStructure. Sci. Rep. 7, 1835 (2017).

5. Zollner, S. In Ellipsometry at the Nanoscale (eds Maria Losurdo & Kurt Hingerl) 607–627 (Springer Berlin Heidelberg, 2013).

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