Dependence of NO2 gas sensitivity of WO3 sputtered films on film density-Reference-Cited by-同舟云学术

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Dependence of NO2 gas sensitivity of WO3 sputtered films on film density

Published:2005-03 Issue:1-2 Volume:474 Page:255-260
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Jin Cheng-Ji,Yamazaki Toshinari,Shirai Yashuyoshi,Yoshizawa Toshio,Kikuta Toshio,Nakatani Noriyuki,Takeda Humio

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. Thin-film gas sensors based on semiconducting metal oxides

2. The effect of additives in tin oxide on the sensitivity and selectivity to NOx and CO

3. The role of surface oxygen vacancies upon WO3 conductivity

4. Metal oxide semiconductor NO2 sensor

5. WO3 sputtered thin films for NOx monitoring

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