Molybdenum thin films with low resistivity and superior adhesion deposited by radio-frequency magnetron sputtering at elevated temperature-Reference-Cited by-同舟云学术

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Molybdenum thin films with low resistivity and superior adhesion deposited by radio-frequency magnetron sputtering at elevated temperature

Published:2014-09 Issue: Volume:567 Page:64-71
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Dai Xinyi,Zhou Aijun,Feng Lidong,Wang Ying,Xu Jin,Li Jingze

Funder

NSFC

Program for New Century Excellent Talents in University

Fundamental Research Funds for the Central Universities

China Postdoctoral Science Foundation

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference31 articles.

1. Preparation of Device-Quality $\bf Cu(In, Ga)Se_{2}$ Thin Films Deposited by Coevaporation with Composition Monitor

2. Fabrication of Cu(In, Ga)Se2 thin films by sputtering from a single quaternary chalcogenide target

3. Cu(In,Ga)Se2 thin films and devices sputtered from a single target without additional selenization

4. Effects of water vapor introduction during Cu(In1-xGax)Se2deposition on thin film properties and solar cell performance

5. Mo Back Contact for Flexible Polyimide Substrate Cu(In, Ga)Se 2 Thin-Film Solar Cells

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2. A Fully‐Bioresorbable Nanostructured Molybdenum Oxide‐Based Electrode for Continuous Multi‐Analyte Electrochemical Sensing;Advanced Materials Interfaces;2024-06-19

3. High-energy sputtering for the deposition of a conductive and adherent single molybdenum layer for solar cell applications;Thin Solid Films;2024-02

4. Molybdenum Thin Film Formation from Molybdenum Nitride Deposited by Plasma-enhanced Atomic Layer Deposition with Hydrogen-permeable Mechanical Capping Layer;ACS Applied Electronic Materials;2023-07-27

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