Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual Kaufman ion-beam source setup-Reference-Cited by-同舟云学术

Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual Kaufman ion-beam source setup

Published:2019-01 Issue: Volume:670 Page:105-112
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Gablech Imrich^ORCID,Svatoš Vojtěch,Caha Ondřej,Dubroka Adam,Pekárek Jan,Klempa Jaroslav,Neužil Pavel,Schneider Michael^ORCID,Šikola Tomáš

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

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