Gas-phase diagnoses in catalytic chemical vapor deposition (hot-wire CVD) processes
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference65 articles.
1. Frontiers in HWCVD
2. New application of Cat-CVD technology and recent status of industrial implementation
3. Detecting reactive species in hot wire chemical vapor deposition
4. Production and Detection of H Atoms and Vibrationally Excited H2 Molecules in CVD Processes
5. Mass-Spectrometric Studies of Catalytic Chemical Vapor Deposition Processes of Organic Silicon Compounds Containing Nitrogen
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1. Application of Cat-CVD Technologies;Catalytic Chemical Vapor Deposition;2019-02-15
2. Fundamentals for Analytical Methods for Revealing Chemical Reactions in Cat-CVD;Catalytic Chemical Vapor Deposition;2019-02-15
3. Structure and optical properties of conglobate hydrogenated amorphous carbon films prepared by pulsed laser-induced chemical vapor deposition;Journal of Alloys and Compounds;2016-05
4. A computational study on the energetics and mechanisms for the dissociative adsorption of SiH (x= 1–4) on W(1 1 1) surface;Applied Surface Science;2016-01
5. Industrialization of Hot Wire Chemical Vapor Deposition for thin film applications;Thin Solid Films;2015-11
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