Low temperature amorphous and nanocrystalline silicon thin film transistors deposited by Hot-Wire CVD on glass substrate-Reference-Cited by-同舟云学术

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Low temperature amorphous and nanocrystalline silicon thin film transistors deposited by Hot-Wire CVD on glass substrate

Published:2006-04 Issue:1-2 Volume:501 Page:303-306
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Fonrodona M.,Soler D.,Escarré J.,Villar F.,Bertomeu J.,Andreu J.,Saboundji A.,Coulon N.,Mohammed-Brahim T.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. Silicon for thin-film transistors

2. Amorphous-silicon thin-film transistors deposited by VHF-PECVD and hot-wire CVD

3. Metastability of hot-wire amorphous-silicon thin-film transistors

4. Nanocrystalline silicon thin film transistors

5. Optimisation of doped microcrystalline silicon films deposited at very low temperatures by hot-wire CVD

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1. Effects of Chamber Pressures on the Passivation Layer of Hydrogenated Nano-Crystalline Silicon Mixed-Phase Thin Film by Using Microwave Annealing;Electronics;2021-09-08

2. Optical, structural evolution and surface morphology studies of hydrogenated silicon films synthesized by rf-magnetron sputtering: Effects of pressure and radio frequency power at low temperature;Optik;2018-09

3. Electronic Behavior of Nanocrystalline Silicon Thin Film Transistor;Advanced Structured Materials;2017-10-25

4. Peculiarities of nanocrystalline silicon films growth on porous anodic alumina surface;Semiconductor Physics Quantum Electronics and Optoelectronics;2017-10-09

5. Hot-wire chemical vapor deposition of nanocrystalline silicon for ambipolar thin-film transistor applications;Applied Surface Science;2015-11

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