Simultaneous recrystallization, phosphorous diffusion and antireflection coating of silicon films using laser treatment-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Simultaneous recrystallization, phosphorous diffusion and antireflection coating of silicon films using laser treatment

Published:2006-02 Issue:2 Volume:496 Page:643-648
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Lien Shui-Yang,Wu Bing-Rui,Mao Hsin-Yuan,Wang Jui-Hao,Hsieh In-Cha,Yao Pin-Chuan,Wuu Dong-Sing

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference22 articles.

1. A novel fabrication process for polysilicon thin film transistors with source/drain contacts formed by deposition and lift-off of highly doped layers

2. Submicrometer poly-Si CMOS fabrication with low-temperature laser doping

3. Production technology of large-area multicrystalline silicon solar cells

4. Solid-phase crystallized Si films on glass substrates for thin film solar cells

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Phosphorus Dopant Diffusion, Activation, and Annealing. Using Infrared Laser for Synthesis of n-Type Silicon Thin Film;Journal of Russian Laser Research;2020-09

2. Direct Laser Doping of Poly-Silicon Thin Films Via Laser Chemical Processing;IEEE Journal of Photovoltaics;2013-10

3. Influence of laser wavelength and beam profile on Nd3+:YAG laser assisted formation of polycrystalline-Si films;Thin Solid Films;2010-05

4. Optical emission spectroscopic studies on laser ablated TiO2 plasma;Applied Surface Science;2009-08

5. Direct micropatterning of high dielectric BaTiO3 films by laser-induced pyrolysis with a nano-crystalline seeding technique;Applied Surface Science;2007-04

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3