Additional control of bombardment by deep oscillation magnetron sputtering: Effect on the microstructure and topography of Cr thin films-Reference-Cited by-同舟云学术

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Additional control of bombardment by deep oscillation magnetron sputtering: Effect on the microstructure and topography of Cr thin films

Published:2016-11 Issue: Volume:619 Page:250-260
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Ferreira F.,Serra R.,Cavaleiro A.,Oliveira J.C.

Funder

FEDER

Fundação para a Ciência e a Tecnologia

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference46 articles.

1. Growth of nanocomposite films: from dynamic roughening to dynamic smoothening;Pei;Acta Mater.,2009

2. Growth-front roughening in amorphous silicon films by sputtering;Karabacak;Phys. Rev. B,2001

3. Mound formation in surface growth under shadowing;Pelliccione;Phys. Rev. B,2006

4. On the evolution of film roughness during magnetron sputtering deposition;Turkin;J. Appl. Phys.,2010

5. Thin-film growth dynamics with shadowing and re-emission effects;Karabacak;J. Nanophotonics,2011

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1. Quantification of the sp3 content in Diamond-Like carbon Films: Effects of Ne plasma addition in Deep Oscillation Magnetron sputtering;Applied Surface Science;2024-10

2. Control of the preferential orientation and properties of HiPIMS and DCMS deposited chromium coating based on bias voltage;Vacuum;2024-09

3. Microstructure and mechanical properties of Cr films with different orientations before and after plasma nitriding;Journal of Vacuum Science & Technology A;2024-04-19

4. A hybrid plasma model for Cr thin film deposition by deep oscillation magnetron sputtering;Journal of Applied Physics;2024-01-16

5. Influence of 1-Ethyl-3-methylimidazolium Diethylphosphate Ionic Liquid on the Performance of Eu- and Gd-Doped Diamond-like Carbon Coatings;Lubricants;2024-01-08

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