Probing into the asymmetric nature of electromigration performance of submicron interconnect via structure

Author:

Roy Arijit,Tan Cher Ming

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference31 articles.

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2. Proceedings of the 38th IEEE International Reliability Physics Symposium, San Jose, CA, 10–13 April 2000;Fischer,2000

3. Dynamical x-ray microscopy investigation of electromigration in passivated inlaid Cu interconnect structures

4. Proceedings of the IEEE International Interconnect Technology Conference, Burlingame, CA, 3–5 June 2002;Fischer,2002

5. Proceedings of the 40th IEEE International Reliability Physics Symposium, Dallas, Texas, 7–11 April 2002;Gill,2002

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