Author:
Chun Inwoo,Efremov Alexander,Yeom Geun Young,Kwon Kwang-Ho
Funder
Ministry of Knowledge Economy
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference32 articles.
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5. Experimental study and global model of inductively coupled CF4∕O2 discharges
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