Author:
Katsidis C.C.,Siapkas D.I.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference52 articles.
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2. Semiconductor Materials and Process Technology Handbook for Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI);Fair,1988
3. Phosphorus electrical activation in high energy P and high flux silicon implanted silicon
4. Annealing behavior of low-energy ion-implanted phosphorus in silicon
Cited by
1 articles.
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