Compact maglev stage system for nanometer-scale positioning

Author:

Takahashi Motohiro,Ogawa Hironori,Kato Takanori

Publisher

Elsevier BV

Subject

General Engineering

Reference16 articles.

1. X-Y-θ nano-positioning table system for a mother machine;Shinno;Annals of the CIRP,2004

2. Development of six-Axis precise positioning system driven by surface motor;Tomita;JSME series C,1996

3. A newly developed long-stroke vertical nano-motion platform with gravity compensator;Takahashi;Journal of Advanced Mechanical Design, Systems, and manufacturing,2008

4. Basic study on differential pumping seal for precision positioning table in vacuum environment;Nakamura;JSME series C,2005

5. Development of 6DOF magnetic levitation stage for lithography tool -background and first report-;Tanaka;JSPE,2009

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