A new probe design combining finite element method and optimization used for vertical probe card in wafer probing

Author:

Chiu Jinn-Tong,Chang Dar-Yuan

Publisher

Elsevier BV

Subject

General Engineering

Reference11 articles.

1. Byrnes HP, Wahl R. Contact for an Electrical Contactor Assembly. United States Patent 4027935; 1997.

2. Modeling the bending of probes used in semiconductor industry;Comeau;IEEE Transactions on Semiconductor Manufacturing,1991

3. Broz JJ, Rincon RM. Probe contact resistance variations during elevated temperature wafer test. Proceedings of the 1999 IEEE International Test Conference; ISBN: 0-7803-5753-1; 1999. p. 396–405.

4. Maekawa S, Takemoto M, Kashiba Y, Deguchi Y, Miki K, Nagata T. Highly reliable probe for wafer testing. Proceedings of the 2000 Electronic Components and Technology Conference; 2000. p. 1152–1156.

5. Development of probing mark analysis model [IC testing];Chao,2003

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