Investigation on the machinability of copper-coated monocrystalline silicon by applying elliptical vibration diamond cutting
Author:
Funder
National Natural Science Foundation of China
Key Technologies Research and Development Program
Publisher
Elsevier BV
Subject
General Engineering
Reference27 articles.
1. Mid-infrared photonics in silicon and germanium;Soref;Nat Photonics,2010
2. Ductile machining of single-crystal silicon for microlens arrays by ultraprecision diamond turning using a slow tool servo;Mukaida;Int J Mach Tool Manufact,2017
3. Review on diamond-machining processes for the generation of functional surface structures;Brinksmeier;CIRP J Manufact Sci Technol,2012
4. Ductile behaviour in single-point diamond-turning of single-crystal silicon;Chao;J Mater Process Technol,2002
5. Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining;Yan;Precis Eng,2009
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