Author:
Satake Urara,Enomoto Toshiyuki,Miyagawa Teppei,Ohsumi Takuya,Nakagawa Hidenori,Funabashi Katsuhiro
Reference20 articles.
1. Grinding and polishing with small tools under computer control;Jones;Opt Eng,1979
2. Technological advances in fine abrasive processes;Komanduri;Ann CIRP,1997
3. Development of ultrasonic vibration assisted polishing machine for micro aspherical die and mold;Suzuki;Ann CIRP,2006
4. The theory and design of plate glass polishing machines;Preston;J Soc Glass Technol,1927
5. Polishing pad surface characteristics in chemical mechanical planarization;McGrath;J Mater Process Technol,2004
Cited by
10 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献