1. Precision engineering: an evolutionary view;Evans,1989
2. Design of a six-axis micro-scale nanopositioner—μHexFlex;Chen;Precis Eng,2006
3. Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism;Culpepper;Precis Eng,2004
4. Ultra-precision wafer positioning by six-axis micro-motion mechanism;Taniguchi;Int J Jpn Soc Precis Eng,1992
5. Kinematic modeling of a 6 DOF tri-stage micro-positioner;Dagalakis,2001