AFM tip-based fabrication of silicon nanostructures with reduced subsurface amorphous layers-Reference-Cited by-同舟云学术

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AFM tip-based fabrication of silicon nanostructures with reduced subsurface amorphous layers

Published:2024-06 Issue: Volume:88 Page:1040-1050
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Tang Jinyan,Li Zhongwei,Ju Bing-Feng,Chen Yuan-Liu^ORCID

Publisher

Elsevier BV

Reference44 articles.

1. A silicon metasurface for full-Stokes polarimetry of infrared light;Ren;Appl Phys Lett,2023

2. Integrated silicon microfluidic chip for picoliter-scale analyte segmentation and microscale printing for mass spectrometry imaging;Shi;Lab Chip,2022

3. Fabrication of Si micropore and graphene nanohole structures by focused ion beam;Md Ibrahim;Sensors,2020

4. Vertical n-type and p-type nanosheet FETs with C-shaped channel;Xiao;IEEE Trans Electron Dev,2023

5. Ultrahigh-density atomic force microscopy data storage with erase capability;Binnig;Appl Phys Lett,1999

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