Author:
Tachibana Kazuki,Michihata Masaki,Takamasu Kiyoshi,Takahashi Satoru
Funder
Ministry of Education, Culture, Sports, Science and Technology
JSPS Research Fellows
Reference9 articles.
1. Surface characterization and defect detection by analysis of images obtained with coherent light;Lonardo;CIRP Ann - Manuf Technol,1991
2. Defect inspection of wafers by laser scattering;Takami;Mater Sci Eng B,1997
3. Enabling 18nm-particle detection on Si surfaces by conventional laser scattering;Tamura,2010
4. Scanning probe microscopes go video rate and beyond;Rost;Rev Sci Instrum,2005
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