Author:
Fesperman Ronnie,Ozturk Ozkan,Hocken Robert,Ruben Shalom,Tsao Tsu-Chin,Phipps James,Lemmons Tiffany,Brien John,Caskey Greg
Reference67 articles.
1. NSF Center for Scalable and Integrated NAno Manufacturing, created 2003. University of California Berkeley. www.sinam.org.
2. ITRS – International Technology Roadmap for Semiconductors; 2007. www.itrs.net.
3. Nanofabrication module integrated with optical aligner;Stuart;J Vac Sci Technol B,2006
4. Flying plasmonic lens in the near field for high-speed nanolithography;Srituravanich;Nat Nanotechnol,2008
5. Fesperman R. Multiscale alignment and positioning system. Ph.D. thesis. University of North Carolina at Charlotte; 2007.
Cited by
34 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献