A review of the existing performance verification infrastructure for micro-CMMs

Author:

Claverley J.D.,Leach R.K.

Funder

UK National Measurement Office Engineering and Flow Metrology Programme

European Commission

Publisher

Elsevier BV

Subject

General Engineering

Reference76 articles.

1. ISO 10360-1:2001 – Geometrical Product Specifications (GPS) – Acceptance and reverification tests for coordinate measuring machines (CMM) – Part 1: Vocabulary,2001

2. Recent developments in dimensional metrology for microsystem components;Cao;Microsyst Technol,2002

3. Design for a compact high-accuracy CMM;Peggs;CIRP Ann – Manuf Technol,1999

4. Advances in traceable nanometrology at the National Physical Laboratory;Leach;Nanotechnology,2001

5. Design of a high-precision 3D-coordinate measuring machine;Vermeulen;CIRP Ann – Manuf Technol,1998

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