A large deflection and high payload flexure-based parallel manipulator for UV nanoimprint lithography: Part II. Stiffness modeling and performance evaluation-Reference-Cited by-同舟云学术

A large deflection and high payload flexure-based parallel manipulator for UV nanoimprint lithography: Part II. Stiffness modeling and performance evaluation

Published:2014-10 Issue:4 Volume:38 Page:872-884
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Teo Tat Joo,Chen I-Ming,Yang Guilin

Publisher

Elsevier BV

Subject

General Engineering

Reference15 articles.

1. Imprint of sub-25nm vias and trenches in polymers;Chou;Appl Phys Lett,1995

2. Imprint lithography with sub-10nm feature size and high throughput;Chou;Microeletron Eng,1997

3. Step and flash imprint lithography: a new approach to high-resolution patterning;Colburn,1999

4. Light propagation with phase discontinuities: generalized laws of reflection and refraction;Yu;Science,2011

5. Aberration-free ultrathin flat lenses and axicons at telecom wavelengths based on plasmonic metasurfaces;Aieta;Nano Lett,2012

Cited by 30 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Heavy-load Nonapod: A novel flexible redundant parallel kinematic machine for multi-DoF forming process;International Journal of Machine Tools and Manufacture;2024-08

2. Analysis of Parasitic Motion in the Aligned Folded Beam Flexure-based Tip-tilt-piston Aligner;Journal of the Korean Society for Precision Engineering;2024-04-01

3. Synthesis of Compliant Parallel Mechanisms Using an Improved Beam-Based Method with the Optimization of Multiple Resonant Modes;Machines;2023-07-12

4. Quasi-Coordinates-Based Closed-Form Dynamic Modeling and Analysis for a 2R1T PKM with a Rigid–Flexible Structure;Machines;2023-02-09

5. Data-driven fractional order phase-lead and proportional–integral feedback control strategy with application to a reluctance-actuated compliant micropositioning system;Sensors and Actuators A: Physical;2022-12