Nanometer profile measurement of large aspheric optical surface by scanning deflectometry with rotatable devices: Uncertainty propagation analysis and experiments-Reference-Cited by-同舟云学术

Nanometer profile measurement of large aspheric optical surface by scanning deflectometry with rotatable devices: Uncertainty propagation analysis and experiments

Published:2012-01 Issue:1 Volume:36 Page:91-96
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Xiao Muzheng,Jujo Satomi,Takahashi Satoru,Takamasu Kiyoshi

Publisher

Elsevier BV

Subject

General Engineering

Reference9 articles.

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4. Analysis of a scanning pentaprism system for measurements of large flat mirrors;Yellowhair;Appl Opt,2007

5. A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers;Gao;Precision Eng,2002

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