High-Dynamic-Range, High-Precision, High-Speed Surface Profile Measurement Using Swept Source Optical Coherence Tomography-Reference-Cited by-同舟云学术

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High-Dynamic-Range, High-Precision, High-Speed Surface Profile Measurement Using Swept Source Optical Coherence Tomography

Published:2024-08-01 Issue:15 Volume:24 Page:24238-24248
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Yue Jinyun¹,Ma Zhenhe¹^ORCID,Jiang Huiwen²,Ding Ning²,Wang Yi¹,Zhao Yuqian¹,Yu Yao¹,Liu Jian¹,Luan Jingmin³^ORCID

Affiliation:

1. School of Control Engineering, Northeastern University at Qinhuangdao, Qinhuangdao, China

2. College of Information Science and Engineering, Northeastern University, Shenyang, China

3. School of Computer and Communication Engineering, Northeastern University at Qinhuangdao, Qinhuangdao, China

Funder

National Natural Science Foundation of China

Fundamental Research Funds for the Central Universities

Natural Science Foundation of Hebei Province

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx8/7361/10617804/10559770.pdf?arnumber=10559770

Reference38 articles.

1. Review of surface profile measurement techniques based on optical interferometry

2. Quantifying abrasive-blasted surface roughness profiles using scanning electron microscopy

3. Algorithms for scanned probe microscope image simulation, surface reconstruction, and tip estimation

4. Nanometer scale patterning and oxidation of silicon surfaces with an ultrahigh vacuum scanning tunneling microscope

5. Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam

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