An in-process measurement method for repair of defective microstructures by using a fast tool servo with a force sensor-Reference-Cited by-同舟云学术

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An in-process measurement method for repair of defective microstructures by using a fast tool servo with a force sensor

Published:2015-01 Issue: Volume:39 Page:134-142
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Chen Yuan-Liu,Wang Shu,Shimizu Yuki,Ito So,Gao Wei,Ju Bing-Feng

Funder

JST (Japan Science and Technology Agency)

JSPS (Japan Society for the Promotion of Science)

Ministry of Education

China Scholarship Council

Publisher

Elsevier BV

Subject

General Engineering

Reference35 articles.

1. Micro engineering;Alting;CIRP Ann Manuf Technol,2003

2. State of the art of micromachining;Masuzawa;CIRP Ann Manuf Technol,2000

3. Design and testing of a fast tool servo for diamond turning;Patterson;Precis Eng,1985

4. Piezoelectric tool actuator for precision machining on conventional CNC turning centers;Woronko;Precis Eng,2003

5. Diamond micro chiseling of large-scale retroreflective arrays;Brinksmeier;Precis Eng,2012

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