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Design and testing of a fast tool servo for diamond turning

  • Published:1985-07 Issue:3 Volume:7 Page:123-128
  • ISSN:0141-6359
  • Container-title:Precision Engineering
  • language:en
  • Short-container-title:Precision Engineering

Author:

Patterson S.R.,Magrab E.B.

Publisher

Elsevier BV

Subject

General Engineering

Reference6 articles.

1. Design and construction of a large, vertical-axis diamond turning machine;Donaldson;Lawrence Livermore National Laboratory Report UCRL-89738,1983

2. The motion control system for the large optics diamond turning machine LODTM;McCue;Lawrence Livermore National Laboratory Report UCRL-89362,1983

3. Piezodriven 50 micrometer range stage with subnanometer resolution;Score;Rev. Sci. Instrum.,1978

4. The application of capacitance micrometry to the control of Fabry-Perot etalons;Hicks;J. Phys. E: Sci. Instrum.,1984

5. A stable, rugged, capacitance-stabilized piezoelectric scanned Fabry-Perot etalon;Rees;J. Phys. E: Sci. Instrum.,1981

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