Traceable atomic force microscope based on monochromatic light interference-Reference-Cited by-同舟云学术

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Traceable atomic force microscope based on monochromatic light interference

Published:2020-01 Issue: Volume:61 Page:48-54
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Yang Wenjun,Liu Xiaojun,Lu Wenlong,Lei Zili,Hu Chi,Chen Cheng

Funder

Science Challenge Project, China

Natural National Science Foundation of China (NSFC), China

China Postdoctoral Science Foundation, China

Publisher

Elsevier BV

Subject

General Engineering

Reference34 articles.

1. Charge collection scanning electron microscopy;Leamy;J Appl Phys,1982

2. Theory of the scanning tunneling microscope;Tersoff;Phys Rev B,1985

3. Atomic force microscope;Binnig;Phys Rev Lett,1986

4. Calibration of step heights and roughness measurements with atomic force microscopes;Garnaes;Precis Eng,2003

5. Nanometer edge profile measurement of diamond cutting tools by atomic force microscope with optical alignment sensor;Gao;Precis Eng,2006

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1. The Influence of the Wavelength of Laser Light on the Non-Contact Measurement of the Roughness of Shiny Cut Surfaces on Stainless Steel A304 Material;Applied Sciences;2024-03-13

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