Author:
Jywe Wen-Yuh,Jeng Yeau-Ren,Liu Chien-Hung,Teng Yun-Feng,Wu Chia-Hung,Wang Hung-Shu,Chen Yi-Jou
Reference16 articles.
1. Vertical micro positioning system using PZT actuator;Goto;Bull Jpn Soc Prec Eng,1988
2. Ultra precision wafer positioning by six axes micro-motion mechanism;Taniguchi;Int J Jpn Soc Prec Eng,1992
3. A six degrees of freedom fine motion mechanism;Henmi;Mechatronics,1992
4. Design and characterization of a low-profile micropositioning stage;Schweizertr;Prec Eng,1996
5. A new family of six degrees of freedom positional devices;Merkle;Nanotechnology,1997
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