Design and analysis of a novel compact XYZ parallel precision positioning stage-Reference-Cited by-同舟云学术

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Design and analysis of a novel compact XYZ parallel precision positioning stage

Published:2020-08-17 Issue:5 Volume:27 Page:1925-1932
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Xie Yanlin,Li Yangmin,Cheung Chi Fai,Zhu Zhiwei,Chen Xigang

Funder

NSFC

State Key Laboratory of Ultra-precision Machining Technology of Hong Kong Polytechnic University

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://link.springer.com/content/pdf/10.1007/s00542-020-04968-6.pdf

Reference27 articles.

1. Ando T, Uchihashi T, Fukuma T (2008) High-speed atomic force microscopy for nano-visualization of dynamic biomolecular processes. Prog Surf Sci 83(7–9):337–437. https://doi.org/10.1016/j.progsurf.2008.09.001

2. Angeles J (2002) Fundamentals of robotic mechanical systems. Springer, Cham

3. Cai K, He X, Tian Y, Liu X, Zhang D, Shirinzadeh B (2018) Design of a XYZ scanner for home-made high-speed atomic force microscopy. Microsyst Technol 24(7):3123–3132. https://doi.org/10.1007/s00542-017-3674-4

4. Dai JS, Ding X (2006) Compliance analysis of a three-legged rigidly-connected platform device. J Mech Des 128(4):755–764. https://doi.org/10.1115/1.2202141

5. Gao J, Zeng Z, Tang H, Chen X, Qiu Q, He S, He Y, Yang Z (2016) Design and assessment of a piezo-actuated 3-dof flexible nanopositioner with large stroke. In: 2016 IEEE international conference on manipulation, manufacturing and measurement on the nanoscale (3M-NANO), July 2016. pp 19–24. https://doi.org/10.1109/3m-nano.2016.7824922

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1. Design and Test of a 2-DOF Compliant Positioning Stage with Antagonistic Piezoelectric Actuation;Machines;2024-06-19

2. A Synthesis Approach of XYZ Compliant Parallel Mechanisms Toward Motion Decoupling With Isotropic Property and Simplified Manufacturing;Journal of Mechanical Design;2024-06-03

3. FlexDelta: A flexure-based fully decoupled parallel xyz positioning stage with a long stroke;Precision Engineering;2024-06

4. Design of a locust leg-like compliant constant-force mechanism supporting large-scale damage-free manipulation;Review of Scientific Instruments;2023-11-01

5. Design of a 2-DOF XZ Precision Positioning Platform Using Novel Z-Shaped Flexure Hinges;2023 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS);2023-10-09

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