Design and Test of a 2-DOF Compliant Positioning Stage with Antagonistic Piezoelectric Actuation

Abstract

This paper designs a two-degrees-of-freedom (DOF) compliant positioning stage with antagonistic piezoelectric actuation. Two pairs of PEAs are arranged in an antagonistic configuration to generate reciprocating motions. Flexure mechanisms are intentionally adopted to construct the fixtures for PEAs, whose elastic deformations can help to reduce the stress concentration on the PEA caused by the extension of the PEA in the other direction. Subsequently, the parameter and performance of the 2-DOF compliant positioning stage is optimized and verified by finite element analysis. Finally, a prototype is fabricated and tested. The experimental results show that the developed positioning stage achieves a working stroke of 28.27 μm × 27.62 μm. Motion resolutions of both axes are 8 nm and natural frequencies in the working directions are up to 2018 Hz, which is promising for high-precision positioning control.