Compound mechanical and chemical-mechanical polishing processing technique for single-crystal silicon carbide-Reference-Cited by-同舟云学术

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Compound mechanical and chemical-mechanical polishing processing technique for single-crystal silicon carbide

Published:2024-03 Issue: Volume:86 Page:160-169
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Ban Xinxing^ORCID,Tian Zhuangzhi,Zhu Jianhui,Duan Tianxu,Zheng Shaodong,Wang Ningchang,Han Shaoxing,Qiu Hui,Li Zhengxin

Publisher

Elsevier BV

Subject

General Engineering

Reference42 articles.

1. The current understanding on the diamond machining of silicon carbide;Goel;J Phys D Appl Phys,2014

2. A review on precision polishing technology of single-crystal SiC;Ma;Crystals,2022

3. Recent advances in silicon carbide chemical mechanical polishing technologies;Hsieh;Micromachines Basel,2022

4. Chemical-mechanical polishing of 4H silicon carbide wafers;Wang;Adv Mater Interfac,2023

5. Damage mechanisms during lapping and mechanical polishing CdZnTe wafers;Li;Rare Met,2010

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Simulation of chemical reactions with methanol and oxalic acid on 4H-SiC surfaces before and after nanoabrasion;Applied Surface Science;2024-12

2. Microscopic removal mechanism of 4 H-SiC during abrasive scratching in aqueous H2O2 and H2O: Insights from ReaxFF molecular dynamics;Tribology International;2024-12

3. Scratching properties of 4H–SiC single crystal after oxidation under different conditions;Wear;2024-11

4. Surface characteristics and material removal mechanisms during nanogrinding on C-face and Si-face of 4H-SiC crystals: Experimental and molecular dynamics insights;Applied Surface Science;2024-08

5. Experimental Investigation on Chemical Mechanical Polishing of ZA27 Alloy Considering Galvanic Corrosion at Zn/Al Interface;ECS Journal of Solid State Science and Technology;2024-07-01

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