Author:
Messier R.,Trolier-McKinstry S.
Reference26 articles.
1. Deposition and mechanical properties of superlattice thin films;Barnett,1993
2. Spectroscopic ellipsometry study of RF-sputtered a-Ge films;Blanco;MRS Symp. Proc,1985
3. Theory of thin-film orientation by ion bombardment during deposition;Bradley;J. Appl. Phys,1986
4. Synthesis of highly oriented piezoelectric AlN films by reactive sputtering;Engelmark;J. Vac. Sci. Technol,2000
5. Fundamentals of Surface and Thin Films Analysis;Feldman,1986
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献