Author:
Pogrebnyak A. D.,Beresnev V. M.,Kaverina A. Sh.,Kolesnikov D. A.,Yakushchenko I. V.,Ilyashenko M. V.,Makhmudov N. A.
Subject
Surfaces, Coatings and Films,Mechanics of Materials
Reference21 articles.
1. Zhang, S., Sun, D., Fu, Y., and Du, H., Recent Advances of Superhard Nanocomposite Coatings: AReview, Surf. Coat. Techn., 2003, vol. 167, nos. 2–3, pp. 113–119.
2. Arnold, S.M. and Cole, B.E., Ion Beam Sputter Deposition of Low Loss Al2O3 Films for Integrated Optics, Thin Solid Films, 1988, vol. 165, no. 1, pp. 1–9.
3. Teslenko-Ponomarenko, V.V., The Research of Microtopography of Surfaces of Al2O3 Films Obtained by the Method of Magnetron Sputtering under Low Pressures, Vopr. At. Nauki Tekhn., Vacuum, Pure Mater., Supercond., 2003, no. 5, pp. 175–178.
4. Messier, R., and Trolier-McKinstry, S., Thin-Film Processes, in Encyclopedia of Materials: Science and Technology, 2nd ed., Pergamon, 2001, pp. 9306–9313.
5. Berg, S. and Nyberg, T., Fundamental Understanding and Modeling of Reactive Sputtering Processes, Thin Solid Films, 2005, vol. 476, pp. 215–230.
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