Impurity analysis of electroplated gold components with multi-layered structures by thermal desorption spectrometry toward application in gold Micro electro mechanical system capacitive accelerometers-Reference-Cited by-同舟云学术

Impurity analysis of electroplated gold components with multi-layered structures by thermal desorption spectrometry toward application in gold Micro electro mechanical system capacitive accelerometers

Published:2023-12 Issue: Volume:21 Page:100226
ISSN:2590-0072
Container-title:Micro and Nano Engineering
language:en
Short-container-title:Micro and Nano Engineering

Author:

Akiyama Takumi,Kurioka Tomoyuki,Chen Chun-Yi,Chang Tso-Fu Mark,Chakraborty Parthojit,Machida Katsuyuki,Ito Hiroyuki,Miyake Yoshihiro,Sone Masato

Funder

Core Research for Evolutional Science and Technology

Japan Science and Technology Agency

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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