Use of amorphous silicon films as sensors-Reference-Cited by-同舟云学术

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Use of amorphous silicon films as sensors

Published:1988-01 Issue:1 Volume:13 Page:11-27
ISSN:0250-6874
Container-title:Sensors and Actuators
language:en
Short-container-title:Sensors and Actuators

Author:

Koike Ryutaro,Kodato Setsuo

Publisher

Elsevier BV

Subject

General Engineering

Reference10 articles.

1. Conduction in non-crystalline systems;Mott;Phil. Mag.,1970

2. Electronic properties of substantially doped amorphous Si and Ge;Spear;Phil. Mag.,1976

3. Characterization of glow-discharge deposited a-Si:H;Fritzsche;Solar Energy Mater.,1980

4. A high performance level meter using an excellent amorphous silicon power sensor;Nakayabu;Proc. 5th Sensor Symp.,1987

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Rapid thermal annealing of LPCVD-SOI substrates for sensor applications;Sensors and Actuators A: Physical;1992-05

2. Micromachining of Silicon for Sensors;Novel Silicon Based Technologies;1991

3. Thin-film pressure transducer with manganese film as the strain gauge;Sensors and Actuators A: Physical;1990-05

4. Silicon in mechanical sensors;Journal of Physics E: Scientific Instruments;1988-12

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