Resonating silicon beam force sensor-Reference-Cited by-同舟云学术

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Resonating silicon beam force sensor

Published:1989-05 Issue:3-4 Volume:17 Page:513-519
ISSN:0250-6874
Container-title:Sensors and Actuators
language:en
Short-container-title:Sensors and Actuators

Author:

Blom F.R.,Bouwstra S.,Fluitman J.H.J.,Elwenspoek M.

Publisher

Elsevier BV

Subject

General Engineering

Reference7 articles.

1. Force and weight measurement;Erdem;J. Phys. E: Sci. Instrum.,1982

2. Precise measurement of small forces;Zulliger;Sensors and Actuators,1983

3. E. P. EerNisse, Miniature quartz resonator force transducer, U.S. Patent 4 215 570 (1980).

4. A vibrating quarts force sensor;Kirman;Proc. Transducer Tempcon Conf., London,14161983

5. Precision force transducer using mechanical resonators;Ueda,11141984

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