Integrated hydrogen leak detector with a tunnel mis structure-Reference-Cited by-同舟云学术

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Integrated hydrogen leak detector with a tunnel mis structure

Published:1988-04 Issue:4 Volume:13 Page:315-321
ISSN:0250-6874
Container-title:Sensors and Actuators
language:en
Short-container-title:Sensors and Actuators

Author:

Murakami Kenji,Ye Dong-Bai,Yamamoto Tatsuo

Publisher

Elsevier BV

Subject

General Engineering

Reference7 articles.

1. Thin-MIS-structure Si negative-resistance diode;Yamamoto;Appl. Phys. Lett.,1972

2. Silicon p-n insulator-metal (p-n-I-M) devices;Yamamoto;Solid-State Electron.,1976

3. Hydrogen-sensitive silicon tunnel MIS switching diodes;Kawamura;IEEE Electron Devices Lett.,1983

4. An integrated hydrogen-switching sensor with a Pd-Si tunnel MIS structure;Ogita;Sensors and Actuators,1986

5. An integrated tunnel MIS hydrogen sensor;Murakami;Proc. 6th Sensor Symp. Tsukuba, Japan,1986

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