Geschwindigkeitsmessungen an den bei der kathodenzerstäubung von kupfer-einkristallen ausgesandten partikeln zur untersuchung der fokussierungsenergien des kristalls

Author:

Kopitzki K.,Stier H.-E.

Publisher

Elsevier BV

Subject

General Physics and Astronomy

Cited by 17 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Measurement and simulation of forces generated when a surface is sputtered;Physics of Plasmas;2017-09

2. An instrument for direct measurements of sputtering related momentum transfer to targets;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-04

3. Effect of correlation of interacting particle masses on metal and compound sputtering;Bulletin of the Russian Academy of Sciences: Physics;2010-02

4. On features of metal and binary compound sputtering by low-energy ions;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2009-08

5. Mass dependence of nitride sputtering;Radiation Effects and Defects in Solids;2003-08

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