Subject
General Physics and Astronomy
Cited by
17 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Measurement and simulation of forces generated when a surface is sputtered;Physics of Plasmas;2017-09
2. An instrument for direct measurements of sputtering related momentum transfer to targets;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-04
3. Effect of correlation of interacting particle masses on metal and compound sputtering;Bulletin of the Russian Academy of Sciences: Physics;2010-02
4. On features of metal and binary compound sputtering by low-energy ions;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2009-08
5. Mass dependence of nitride sputtering;Radiation Effects and Defects in Solids;2003-08